Vacuum Sputtering with a Homemade Magnetron

Vacuum Sputtering with a Homemade Magnetron

“You can never be too rich or too thin,” the saying goes, and when it comes to coatings, it’s true that thinner is often better. The way to truly thin coatings, ones that are sometimes only a few atoms thick, is physical vapor deposition, or PVD, a technique where a substance is transformed into a vapor and condensed onto a substrate, sometimes using a magnetron to create a plasma.


It sounds complicated, but with a few reasonable tools and a healthy respect for high voltages, a DIY magnetron for plasma sputtering can get you started. To be fair, [Justin Atkin] worked on his setup for years, hampered initially by having to settle for found parts and general scrap for his builds. As with many things, access to a lathe and the skills to use it proved to be enabling, allowing him to make custom parts like the feedthrough for the vacuum chamber as well as a liquid-cooled base, which prevents heat from ruining the magnets that concentrate the plasma onto the target metal. Using a high-voltage DC supply made from old microwave parts, [Justin] has been able to sputter copper films onto glass slides, with limited success using other metals. He also accidentally created a couple of dichroic mirrors by sputtering with copper oxides rather than pure copper. The video below has some beautiful shots of the ghostly green and purple glow.


A rig such as this opens up a lot of possibilities, from optics to DIY semiconductors. It may not be quite as elaborate as some PVD setups we’ve seen, but we’re still pretty impressed.

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